Substage with 30 mm travel and 50 nm repeatability


Our range of stages are suited for orthogonal positioning solutions in atmosphere, SEM/FIB, and UHV.

The LT12830 is primarily used in SEM/FIB to enhance the accuracy and functionality of the standard microscope stage. It is an economical and technically superior alternative to laser interferometer stages.

It is built specifically for lithography, cell counting, nanoprobing, and failure analysis applications and contains two positional encoders per axis for automatic yaw error compensation.

Optional software for three-point alignment is available.